Pixer Enables Technology For:
Mask Makers
- Tune your masks to meet required CD specifications and for optimal performance
- Yield improvement and fast turn-around on all mask types
- Achieve advanced CD Uniformity & MTT specifications
- Leverage existing installed mask manufacturing equipment
- Postpone purchasing additional advanced writing and etching tools
IC Manufacturers
- Improve your Lithography Process Window (PW) and overall productivity
- "Pellicle on" CD Uniformity improvement
- Extend the life of your installed base of scanners by improving the PW
- Improve yield on specific critical mask levels: dry and immersion lithography
- Improve chip binning: higher speed, lower leakage, etc.
Pixer Galileo™ - Blank Transmission Monitoring
Galileo™ is the industry’s first high speed, high resolution DUV metrology tool. Galileo enables measurement of DUV transmission with a 0.1% resolution limit and is sensitive to transmission changes of 0.01%. Measurements can be made on both quartz and MoSi coated blanks. Sensitivity does not come at the expense of speed: over 1000 sample points can be measured in less than 20 minutes.
With the challenge of ever decreasing CD uniformity (CDU) requirements in lithography, even mask blank contribution can be significant. At 45nm half pitch logic, 0.5% transmission non-uniformity can account for 40-50% of the overall intrafield CDU budget.Today’s best mask blanks have better than 0.1% non-uniformity. With Galileo, blank manufacturers have the ability to determine which blanks are best for critical litho steps.
Galileo Specifications
| Mask Positioning |
|
| Stage drift | <1μm/hr |
| Mask positioning accuracy | 3μm (1σ) |
| Mask positioning repeatability | 1μm (1σ) |
| Mask positioning reproducibility | 3μm (1σ) |
| Mask positioning precision | 3.5μm (1σ) |
| Transmission Measurement Unit | |
| DUV Full Spot Size | 2.5mm |
| Repeatability | 0.03% (1σ) on bare quartz |
| Reproducibility | 0.05 % (1σ) on bare quartz |
| Throughput | |
| Cycle time | <6min |
| MAM time (Pitch <2.5mm) | 1 sec |
| Vision | |
| High Mag FOV | 640X480 μm |
| Low Mag FOV | 6400X4800 μm |
Galileo Value Proposition Summary
Blank Manufacturers
• High sensitivity DUV transmission monitoring
• World class TPT: 1000 measurement sites in <20 minutes for low CoO
• Measures quartz and MoSi coated blanks
• SMIF loading and Class 1 measurement chamber
• Enables blank grading by transmission uniformity
Galileo: Providing performance to blank users at a low CoO for blank manufacturers
Lithographers
• Enables purchase of “high uniformity” grade blanks for critical layers, improving intrafield CD uniformity in many cases
Galileo: Enabling lithographers to specify blanks that improve CD uniformity